The present masonry structure and towers date back to the 9th century A.D. This has been determined from an inscription in the structure made during the reign of Chola kings who ruled during that era. Tiruvannamalai was under the Pallava Kings who ruled from Kanchipuram before the 9th century – the earliest inscriptions dating back to early 9th century is an indication.The 7th century Nayanar saints Sambandar and Appar, have mentioned the deity in the poetic work Tevaram. Sekkizhar, the author of the Periyapuranam mentions that both Appar and Sambandar worshipped Annamalaiyar in the temple. The Chola Kings ruled over the region for more than four centuries from 850 to 1280 and have made donations to the temple. During the 14th Century, the Hoysala Kings had their capital at Tiruvannamalai, starting 1328. There are 48 inscriptions from the Sangama Dynasty (1336–1485), 2 inscriptions from Saluva Dynasty and 55 inscriptions from Tuluva Dynasty (1491–1570) that ruled the Vijayanagara Empire, indicating generous gifts to the temple from the rulers. There are also inscriptions from the rule of Krishnadeva Raya (1509–1529), the most powerful Vijayanagara king who made generous contributions to the temple. Most of the Vijayanagara inscriptions were written in Tamil and a few in Kannada and Sanskrit. During 17th century, the temple came under the sway of the Nawab of the Carnatic. There was confusion and chaos after 1753. Muraru Raya, Krishna Raya, Mrithis Ali Khan, Burkat Ullakhan, French Soupries and Sambrinet, English Captain Stephen Smith besieged this place and had their successes and defeats. The French occupied it in 1757 and it came under the control of British in 1760.During the first half of the 19th century, it came under the The temple is currently maintained by the Hindu religious and Endowment board of the Government of Tamil Nadu.
